Preparation of Pb(Zr, Ti)O3 thin films sputtered from a multi-element metallic target
Nguyen, Thanh Huy
Vu, Ngoc Hung
Nguyen, Phu Thuy
Vu, Ngoc Hung
Nguyen, Phu Thuy
PZT thin films have been grown on Pt/Ti/Si02/Si substrates by the
reactive RF-magnetron sputtering deposition method using a multi-element
metallic target. The AB03 perovskite structure in the thin films sputtered at a
substrate temperature of 250 °c was formed through various intermediate
phases by annealing at 650 °c for 1 hour in the air or an oxygen gas ambience.
The film compositions were estimated by Electron Probe Micro-Analyzer
(EPMA). The surface morphology observed by Atomic Force Microscopy (AFM)
showed a densely packed grain structure with no rosettes structure. The
remanent polarization value of the thin film with a thickness of 500 nm was
1.37 nC/cm .
Chi tiết xin mời tham khảo tại http://repository.vnu.edu.vn/handle/VNU_123/57890
Title: | Preparation of Pb(Zr, Ti)O3 thin films sputtered from a multi-element metallic target |
Authors: | Nguyen, Thanh Huy Vu, Ngoc Hung Nguyen, Phu Thuy |
Keywords: | Pb(Zr, Ti)O3 thin films;multi-element metallic target |
Issue Date: | 2004 |
Publisher: | H. : ĐHQGHN |
Series/Report no.: | Vol. 20;No. 1 (2004) |
Description: | p. 31-36 |
URI: | http://repository.vnu.edu.vn/handle/VNU_123/57890 |
ISSN: | 2588-1124 |
Appears in Collections: | Mathematics and Physics |
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